TY  - BOOK
AU  - Levinshtein, Mikhail E., editor. 
AU  - Shu, Michael S., editor. 
TI  - Semiconductor technology: processing and novel fabrication techniques 
SN  - 0471127922
U1  - FOR 621.381 Se5 1997 
PY  - 1997///
CY  - New York
PB  - John Wiley & Sons, Inc.
KW  -  Semiconductors
KW  - Congresses
KW  - Mathematical models
N1  - Includes bibliographical references and index
ER  -