Maluf, Nadim <br/><br/>
An Introduction to microelectromechanical systems engineering /  
Nadim Maluf.  
 - Boston :  Artech House,  2000. 
 - xix, 265 pages :  illustration ;   23 centimeter. 
<br/><br/> Includes index.  
<br/><br/><label>ISBN: </label>0890065810 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems. 
<br/><br/><label>Dewey Class. No.: </label>FOR 621.381 M29i 2000