TY  - BOOK
AU  - Maluf, Nadim
TI  - An Introduction to microelectromechanical systems engineering / 
SN  - 0890065810
U1  - FOR 621.381 M29i 2000 
PY  - 2000///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems.
N1  - Includes index.
ER  -